We have migrated to a new webpage hosted by the University of Rochester.
Proximity effect correction software
We have developed some proximity-effect-correction software in Matlab for electron beam lithography. It is posted on our github page: https://github.com/nicholgroup/urpec. It is still a work in progress, but we welcome any comments and suggestions.
50 nm Au on GaAs, written at 30 kV with 200 nm PMMA.