{"id":1322,"date":"2019-03-08T19:26:48","date_gmt":"2019-03-08T19:26:48","guid":{"rendered":"https:\/\/labsites.rochester.edu\/nicholgroup\/?p=1322"},"modified":"2019-03-08T19:26:48","modified_gmt":"2019-03-08T19:26:48","slug":"proximity-effect-correction-software","status":"publish","type":"post","link":"https:\/\/labsites.rochester.edu\/nicholgroup\/proximity-effect-correction-software\/","title":{"rendered":"Proximity effect correction software"},"content":{"rendered":"\n<p> We have developed some proximity-effect-correction software in Matlab for electron beam lithography. It is posted on our github page:&nbsp; <a rel=\"noreferrer noopener\" href=\"https:\/\/github.com\/nicholgroup\/urpec\" target=\"_blank\">https:\/\/github.com\/nicholgroup\/urpec.<\/a>&nbsp;It is still a work in progress, but we welcome any comments and suggestions. <\/p>\n\n\n\n<div class=\"wp-block-image\"><figure class=\"aligncenter is-resized\"><a href=\"https:\/\/labsites.rochester.edu\/nicholgroup\/wp-content\/uploads\/2019\/07\/pat2.png\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/labsites.rochester.edu\/nicholgroup\/wp-content\/uploads\/2019\/07\/pat2-1024x768.png\" alt=\"\" class=\"wp-image-2342\" width=\"373\" height=\"279\"\/><\/a><\/figure><\/div>\n\n\n\n<p>\n\n50 nm Au on GaAs, written at 30 kV with 200 nm PMMA.\n\n<\/p>\n","protected":false},"excerpt":{"rendered":"<p>We have developed some proximity-effect-correction software in Matlab for electron beam lithography. It is posted on our github page:&nbsp; https:\/\/github.com\/nicholgroup\/urpec.&nbsp;It is still a work in progress, but we welcome any&hellip;<\/p>\n","protected":false},"author":26,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[16],"tags":[],"class_list":["post-1322","post","type-post","status-publish","format-standard","hentry","category-news"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Proximity effect correction software - Nichol Group<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/labsites.rochester.edu\/nicholgroup\/proximity-effect-correction-software\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Proximity effect correction software - Nichol Group\" \/>\n<meta property=\"og:description\" content=\"We have developed some proximity-effect-correction software in Matlab for electron beam lithography. It is posted on our github page:&nbsp; https:\/\/github.com\/nicholgroup\/urpec.&nbsp;It is still a work in progress, but we welcome any&hellip;\" \/>\n<meta property=\"og:url\" content=\"https:\/\/labsites.rochester.edu\/nicholgroup\/proximity-effect-correction-software\/\" \/>\n<meta property=\"og:site_name\" content=\"Nichol Group\" \/>\n<meta property=\"article:published_time\" content=\"2019-03-08T19:26:48+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/labsites.rochester.edu\/nicholgroup\/wp-content\/uploads\/2019\/07\/pat2-1024x768.png\" \/>\n<meta name=\"author\" content=\"John Nichol\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Written by\" \/>\n\t<meta name=\"twitter:data1\" content=\"John Nichol\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"Article\",\"@id\":\"https:\\\/\\\/labsites.rochester.edu\\\/nicholgroup\\\/proximity-effect-correction-software\\\/#article\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/labsites.rochester.edu\\\/nicholgroup\\\/proximity-effect-correction-software\\\/\"},\"author\":{\"name\":\"John Nichol\",\"@id\":\"https:\\\/\\\/labsites.rochester.edu\\\/nicholgroup\\\/#\\\/schema\\\/person\\\/078b2bece190bb5d00dbb1bca2fbc2f8\"},\"headline\":\"Proximity effect correction software\",\"datePublished\":\"2019-03-08T19:26:48+00:00\",\"mainEntityOfPage\":{\"@id\":\"https:\\\/\\\/labsites.rochester.edu\\\/nicholgroup\\\/proximity-effect-correction-software\\\/\"},\"wordCount\":54,\"commentCount\":0,\"image\":{\"@id\":\"https:\\\/\\\/labsites.rochester.edu\\\/nicholgroup\\\/proximity-effect-correction-software\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/labsites.rochester.edu\\\/nicholgroup\\\/wp-content\\\/uploads\\\/2019\\\/07\\\/pat2-1024x768.png\",\"articleSection\":[\"News\"],\"inLanguage\":\"en-US\"},{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/labsites.rochester.edu\\\/nicholgroup\\\/proximity-effect-correction-software\\\/\",\"url\":\"https:\\\/\\\/labsites.rochester.edu\\\/nicholgroup\\\/proximity-effect-correction-software\\\/\",\"name\":\"Proximity effect correction software - 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